The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2015
Filed:
Dec. 20, 2013
Applicant:
Taiyo Yuden Co., Ltd., Tokyo, JP;
Inventors:
Kenya Hashimoto, Chiba, JP;
Jiansong Liu, Chiba, JP;
Masanori Ueda, Tokyo, JP;
Shinji Taniguchi, Tokyo, JP;
Tokihiro Nishihara, Tokyo, JP;
Assignee:
TAIYO YUDEN CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/00 (2006.01); H01L 41/04 (2006.01); H03H 9/56 (2006.01); H03H 9/58 (2006.01); H03H 9/02 (2006.01); H03H 9/17 (2006.01); H03H 9/64 (2006.01);
U.S. Cl.
CPC ...
H03H 9/564 (2013.01); H03H 9/582 (2013.01); H03H 9/02086 (2013.01); H03H 9/173 (2013.01); H03H 9/174 (2013.01); H03H 9/175 (2013.01); H03H 9/6496 (2013.01);
Abstract
A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode located to sandwich the piezoelectric film; a load film formed from patterns in a resonance region in which the lower electrode and the upper electrode face each other across the piezoelectric film, wherein the patterns are formed so as to surround a center of the resonance region and intersect with a pathway extending from the center to an outer periphery of the resonance region.