The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9166502 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 20, 2015

Filed:

Aug. 16, 2012
Applicants:

Yoshihiro Hasegawa, Tama, JP;

Yasuyoshi Takai, Kawasaki, JP;

Inventors:

Yoshihiro Hasegawa, Tama, JP;

Yasuyoshi Takai, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 31/00 (2006.01); H02N 1/00 (2006.01); H01G 5/16 (2006.01);
U.S. Cl.
CPC ...
H02N 1/006 (2013.01); H01G 5/16 (2013.01); Y10T 29/43 (2015.01);
Abstract

The present invention provides a technology for decreasing a dispersion of the performance among electromechanical transducers each having through wiring. A method for manufacturing an electromechanical transducer includes: obtaining a structure in which an insulative portion having a through hole therein is bonded onto an electroconductive substrate; filling the through hole with an electroconductive material to form a through wiring which is electrically connected with the electroconductive substrate; and using the electroconductive substrate as a first electrode, forming a plurality of vibrating membrane portions including a second electrode, which opposes to the first electrode through a plurality of gaps, on an opposite side of the first electrode to the side having the insulative portion, to thereby forming a plurality of cells.


Find Patent Forward Citations

Quick Actions:

Hasegawa, Yoshihiro. (2015). Method for manufacturing an electromechanical transducer (U.S. Patent No. 9166502). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9166502

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…