The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2015
Filed:
Jun. 03, 2013
Purdue Research Foundation, West Lafayette, IN (US);
Dimitrios Peroulis, West Lafayette, IN (US);
Adam Fruehling, West Lafayette, IN (US);
Joshua Azariah Small, Lexington Park, MD (US);
Xiaoguang Liu, West Lafayette, IN (US);
Wasim Irshad, West Lafayette, IN (US);
Muhammad Shoaib Arif, West Lafayette, IN (US);
Purdue Research Foundation, West Lafayette, IN (US);
Abstract
A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.