The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2015
Filed:
Dec. 03, 2013
Applicant:
Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;
Inventors:
Assignee:
Samsung Display Co., Ltd., , KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 39/18 (2006.01); B65G 39/09 (2006.01); H01L 21/677 (2006.01); B65G 21/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67706 (2013.01); B65G 21/2072 (2013.01); B65G 39/09 (2013.01); B65G 39/18 (2013.01);
Abstract
A side roller moves up and down and a substrate transport device including the same prevents a substrate from being broken due to a foreign material decreasing wear of the side roller by transportation of the substrate. The side roller improves a yield of a transportation process.