The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2015

Filed:

Sep. 07, 2012
Applicants:

John A. Higginson, Santa Clara, CA (US);

Andreas Bibl, Los Altos, CA (US);

David Albertalli, Santa Clara, CA (US);

Inventors:

John A. Higginson, Santa Clara, CA (US);

Andreas Bibl, Los Altos, CA (US);

David Albertalli, Santa Clara, CA (US);

Assignee:

LuxVue Technology Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01T 23/00 (2006.01); B81C 99/00 (2010.01);
U.S. Cl.
CPC ...
B81C 99/002 (2013.01);
Abstract

Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool includes an articulating transfer head assembly, a carrier substrate holder, and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. The articulating transfer head assembly may include an electrostatic voltage source connection and a substrate supporting an array of electrostatic transfer heads.


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