The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2015
Filed:
Nov. 27, 2013
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Stefan Kolb, Unterschleissheim, DE;
Andreas Meiser, Sauerlach, DE;
Till Schloesser, Munich, DE;
Wolfgang Werner, Munich, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); B81B 3/00 (2006.01); G01P 15/125 (2006.01); G01N 27/22 (2006.01); G01L 9/12 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81C 1/0015 (2013.01); G01L 9/12 (2013.01); G01N 27/223 (2013.01); G01P 15/125 (2013.01);
Abstract
A MEMS device includes a fixed electrode and a movable electrode arranged isolated and spaced from the fixed electrode by a distance. The movable electrode is suspended against the fixed electrode by one or more spacers including an insulating material, wherein the movable electrode is laterally affixed to the one or more spacers.