The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Dec. 05, 2012
Applicant:
Nihon Dempa Kogyo Co., Ltd., Tokyo, JP;
Inventors:
Keisuke Hirano, Saitama, JP;
Noritoshi Kimura, Saitama, JP;
Assignee:
NIHON DEMPA KOGYO CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H03H 9/02 (2006.01); H03H 9/24 (2006.01);
U.S. Cl.
CPC ...
H01L 41/09 (2013.01); H03H 9/02228 (2013.01); H03H 2009/0244 (2013.01); H03H 2009/241 (2013.01);
Abstract
A resonator includes an interdigital transducer electrode, a resonance part, a supporting part, and two beam parts. The interdigital transducer electrode is disposed on a piezoelectric thin film. The resonance part is held on a substrate through an air gap. The supporting part supports the resonance part. The two beam parts connect the resonance part to the supporting part at both ends of the resonance part. The air gap forms a level difference at the supporting part or level differences at the respective two beam parts.