The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Aug. 14, 2012
Jun-sik Cho, Daejeon, KR;
Kyung-hoon Yoon, Daejeon, KR;
Sejin Ahn, Daejeon, KR;
Jihye Gwak, Daejeon, KR;
Jae-ho Yun, Daejeon, KR;
Ara Cho, Seoul, KR;
Kee-shik Shin, Daejeon, KR;
Seoungkyu Ahn, Daejeon, KR;
Young-joo Eo, Daejeon, KR;
Jin-su Yoo, Seoul, KR;
Sang-hyun Park, Daejeon, KR;
Joo-hyung Park, Daejeon, KR;
Jun-Sik Cho, Daejeon, KR;
Kyung-Hoon Yoon, Daejeon, KR;
SeJin Ahn, Daejeon, KR;
Jihye Gwak, Daejeon, KR;
Jae-Ho Yun, Daejeon, KR;
Ara Cho, Seoul, KR;
Kee-Shik Shin, Daejeon, KR;
SeoungKyu Ahn, Daejeon, KR;
Young-Joo Eo, Daejeon, KR;
Jin-Su Yoo, Seoul, KR;
Sang-Hyun Park, Daejeon, KR;
Joo-Hyung Park, Daejeon, KR;
KOREA INSTITUTE OF ENERGY RESEARCH, Daejeon, KR;
Abstract
A method of forming a nanometer-scale prominence and depression structure on a zinc oxide thin film in a wet-etching method, and the method includes the steps of: preparing a substrate; forming a nano structure having a height and a width of a nanometer range; forming the zinc oxide thin film on the substrate on which the nano structure is formed; and wet-etching the zinc oxide thin film, in which in the wet-etching step, zinc oxide having relatively low physical compactness is preferentially etched since the zinc oxide is positioned on the nano structure, and thus the prominence and depression structure is formed around the nano structure by the etching. The method is effective in that a thin film can be uniformly formed on the prominence and depression structure, and an electrolyte or an organic material may uniformly penetrate between the prominence and depression structure.