The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2015

Filed:

Apr. 10, 2013
Applicant:

Silanna Semiconductor U.s.a., Inc., San Diego, CA (US);

Inventors:

Stuart B. Molin, Carlsbad, CA (US);

Michael A. Stuber, Carlsbad, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/84 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 21/8234 (2006.01); H01L 29/73 (2006.01); H01L 29/732 (2006.01); H01L 29/739 (2006.01); H01L 29/744 (2006.01); H01L 27/082 (2006.01); H01L 27/088 (2006.01); H01L 29/06 (2006.01); H01L 21/683 (2006.01); H01L 29/417 (2006.01); H01L 29/423 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7812 (2013.01); H01L 21/6835 (2013.01); H01L 21/823487 (2013.01); H01L 24/13 (2013.01); H01L 27/088 (2013.01); H01L 27/0823 (2013.01); H01L 29/0657 (2013.01); H01L 29/66272 (2013.01); H01L 29/66333 (2013.01); H01L 29/66363 (2013.01); H01L 29/66666 (2013.01); H01L 29/66712 (2013.01); H01L 29/66734 (2013.01); H01L 29/73 (2013.01); H01L 29/732 (2013.01); H01L 29/7317 (2013.01); H01L 29/7394 (2013.01); H01L 29/7395 (2013.01); H01L 29/744 (2013.01); H01L 29/781 (2013.01); H01L 29/7813 (2013.01); H01L 29/7827 (2013.01); H01L 24/05 (2013.01); H01L 24/11 (2013.01); H01L 29/0696 (2013.01); H01L 29/41741 (2013.01); H01L 29/4236 (2013.01); H01L 2221/6834 (2013.01); H01L 2221/68327 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/056 (2013.01); H01L 2224/05638 (2013.01); H01L 2224/1148 (2013.01); H01L 2224/131 (2013.01); H01L 2224/1302 (2013.01); H01L 2224/13022 (2013.01); H01L 2224/13023 (2013.01); H01L 2224/13147 (2013.01); H01L 2224/48 (2013.01); H01L 2924/1301 (2013.01); H01L 2924/1304 (2013.01); H01L 2924/1305 (2013.01); H01L 2924/13055 (2013.01); H01L 2924/13091 (2013.01);
Abstract

A vertical semiconductor device is formed in a semiconductor layer having a first surface, a second surface and background doping. A first doped region, doped to a conductivity type opposite that of the background, is formed at the second surface of the semiconductor layer. A second doped region of the same conductivity type as the background is formed at the second surface of the semiconductor layer, inside the first doped region. A portion of the semiconductor layer is removed at the first surface, exposing a new third surface. A third doped region is formed inside the semiconductor layer at the third surface. Electrical contact is made at least to the second doped region (via the second surface) and the third doped region (via the new third surface). In this way, vertical DMOS, IGBT, bipolar transistors, thyristors, and other types of devices can be fabricated in thinned semiconductor, or SOI layers.


Find Patent Forward Citations

Loading…