The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Jun. 24, 2013
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Dario Tenaglia, Gravina di Catania, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A method for forming electrical-contact interface regions on a wafer including a silicon-carbide substrate having a surface with at least one conductive region facing the surface. The method includes forming a first and a second resist layer; forming; removing portions of the second resist layer to form a through opening partially aligned to the conductive region; removing, selective portions of the first resist layer to expose the surface of the substrate; removing portions of the first resist layer that extend laterally staggered with respect to the through opening; depositing a nickel layer on the wafer to form a nickel region on the substrate in an area corresponding to the conductive region; removing the first and second resist layers; and carrying out a step of thermal treatment of the wafer to form nickel-silicide regions in electrical contact with the conductive region.