The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Jan. 14, 2013
Sinfonia Technology Co., Ltd., Tokyo, JP;
Takumi Mizokawa, Tokyo, JP;
Yasuyoshi Kitazawa, Tokyo, JP;
SINFONIA TECHNOLOGY CO., LTD., Tokyo, JP;
Abstract
The wafer transport apparatus prevents contaminant deposited on an unprocessed wafer from adhering to a processed wafer. Carrying-in load portA is loaded with a FOUPstoring an unprocessed wafer W. Carrying-in chamberA has a transport robotA which takes out the unprocessed wafer Wfrom the FOUP. Carrying-in load lockA is accessed by the transport robotA from the carrying-in chamberA side. Carrying-out load portB is loaded with the FOUPthat can store a processed wafer W. Carrying-out chamberB has a transport robotB which passes the processed wafer Wto the FOUP. Carrying-out load lockB is accessed by the transport robotB from the carrying-out chamberB side. The carrying-in chamberA and carrying-out chamberB are separated from each other. The carrying-in load lockA and carrying-out load lockB are arranged on different stages.