The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Sep. 13, 2012
Cheol-kyu Yang, Suwon-si, KR;
Seog-min Lee, Suwon-si, KR;
Chul-young Jang, Hwaseong-si, KR;
Dong-min Son, Incheon, KR;
Byung-ho Ahn, Hwaseong-si, KR;
Du-han Jeon, Yongin-si, KR;
Yong-kyu Joo, Hwaseong-si, KR;
Sang-cheol Ha, Suwon-si, KR;
Cheol-Kyu Yang, Suwon-si, KR;
Seog-Min Lee, Suwon-si, KR;
Chul-Young Jang, Hwaseong-si, KR;
Dong-Min Son, Incheon, KR;
Byung-Ho Ahn, Hwaseong-si, KR;
Du-Han Jeon, Yongin-si, KR;
Yong-Kyu Joo, Hwaseong-si, KR;
Sang-Cheol Ha, Suwon-si, KR;
Abstract
A batch type apparatus may include a tube; a boat configured to receive a plurality of semiconductor substrates, the boat vertically moved into the tube; a gas nozzle vertically arranged in the tube, the tube having a first portion and a second portion upwardly extended from the first portion; a gas pipe for supplying reaction gases to the gas nozzle, the gas pipe having a horizontal extension and a vertical extension, and the vertical extension extended in the gas nozzle; a fixing member for fixing the first portion of the gas nozzle to the gas pipe, the fixing member having strength higher than that of the gas nozzle; and a clamping member for clamping the gas pipe to the tube. Therefore, breakage of the gas nozzle may be suppressed.