The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2015

Filed:

Oct. 31, 2012
Applicant:

Hitachi, Ltd., Tokyo, JP;

Inventors:

Kumiko Konishi, Kokubunji, JP;

Natsuki Yokoyama, Mitaka, JP;

Norifumi Kameshiro, Tokyo, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/04 (2006.01); H01L 29/47 (2006.01); H01L 29/872 (2006.01); H01L 29/66 (2006.01); H01L 29/861 (2006.01); H01L 29/78 (2006.01); H01L 29/16 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/046 (2013.01); H01L 21/0475 (2013.01); H01L 29/0615 (2013.01); H01L 29/47 (2013.01); H01L 29/66068 (2013.01); H01L 29/66136 (2013.01); H01L 29/66143 (2013.01); H01L 29/7827 (2013.01); H01L 29/8611 (2013.01); H01L 29/872 (2013.01); H01L 29/1608 (2013.01);
Abstract

A Schottky junction type semiconductor device in which the opening width of a trench can be decreased without deteriorating the withstanding voltage. The cross sectional shape of a trench has a shape of a sub-trench in which the central portion is higher and the periphery is lower at the bottom of the trench, and a p type impurity is introduced vertically to the surface of the drift layer thereby forming a pSiC region, which is formed in contact to the inner wall of the trench having the sub-trench disposed therein, such that the junction position is formed more deeply in the periphery of the bottom of the trench than the junction position in the central portion of the bottom of the trench.


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