The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
May. 05, 2014
Applicant:
Braggone Oy, Oulu, FI;
Inventor:
Ari Karkkainen, Oulu, FI;
Assignee:
BRAGGONE OY, Oulu, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09D 183/04 (2006.01); G03F 1/46 (2012.01); C08G 77/52 (2006.01); C09D 183/14 (2006.01); G03F 7/075 (2006.01); G03F 7/09 (2006.01); C09D 5/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
G03F 1/46 (2013.01); C08G 77/52 (2013.01); C09D 5/006 (2013.01); C09D 183/14 (2013.01); G03F 7/0752 (2013.01); G03F 7/091 (2013.01); H01L 21/02118 (2013.01);
Abstract
A silicon polymer material, which has a silicon polymer backbone with chromophore groups attached directly to at least a part of the silicon atoms, the polymer further exhibiting carbosilane bonds. The film forming composition and resulting coating properties can be tailored to suit the specific exposure wavelength and device fabrication and design requirements. By using two different chromophores the refractive index and the absorption co-efficient can be efficiently tuned. By varying the proportion of carbosilane bonds, and a desired Si-content of the anti-reflective coating composition can be obtained.