The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Mar. 14, 2013
Applicants:
Romik Chatterjee, Austin, TX (US);
Robert Martin Eastlund, Austin, TX (US);
Christopher Jan Koci, Katy, TX (US);
Archer Forrest Finley, Austin, TX (US);
Inventors:
Romik Chatterjee, Austin, TX (US);
Robert Martin Eastlund, Austin, TX (US);
Christopher Jan Koci, Katy, TX (US);
Archer Forrest Finley, Austin, TX (US);
Assignee:
GRAFTEK IMAGING INC., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 5/16 (2006.01); G01N 21/00 (2006.01); G01N 21/95 (2006.01); G01N 21/88 (2006.01); G01J 1/04 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01N 21/8806 (2013.01); G01J 2001/0481 (2013.01);
Abstract
A lighting dome that can be used to inspect semiconductor wafers includes a small aperture, and can include backlighting, a reflectance gradient and/or a broad spectrum light source. A pin hole lens is aligned with the small aperture.