The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Dec. 04, 2007
Michael B. Allen, Buda, TX (US);
Jesse C. Ramos, Austin, TX (US);
Jeffrey P. Geuea, Bastrop, TX (US);
Allan T. Nelson, Bastrop, TX (US);
Michael B. Allen, Buda, TX (US);
Jesse C. Ramos, Austin, TX (US);
Jeffrey P. Geuea, Bastrop, TX (US);
Allan T. Nelson, Bastrop, TX (US);
Cypress Semiconductor Corporation, San Jose, CA (US);
Abstract
Provided herein is a method of processing an electronic device including operating a processing chamber at a first temperature while a workpiece is being processed and removing the workpiece and a carrier holding the workpiece from the processing chamber while decreasing the temperature within the processing chamber to a second temperature significantly lower than the first temperature. The method also includes increasing the temperature within the processing chamber to a third temperature significantly greater than the second temperature and significantly less than the first temperature while the processing chamber has no workpiece or carrier within.