The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Jul. 29, 2009
D. Guy Eristoff, Singapore, SG;
Michael S. Barnes, San Ramon, CA (US);
Arthur C. Wall, Morgan Hill, CA (US);
Terry Bluck, Santa Clara, CA (US);
D. Guy Eristoff, Singapore, SG;
Michael S. Barnes, San Ramon, CA (US);
Arthur C. Wall, Morgan Hill, CA (US);
Terry Bluck, Santa Clara, CA (US);
INTEVAC, INC., Santa Clara, CA (US);
Abstract
A substrate processing system particularly suitable for fabricating solar cells. The system has a front end module transporting cassettes, each cassette holding a preset number of substrates therein; a loading module coupled to the front end module and having mechanism for loading substrates from the cassettes onto carriers; and a plurality of processing chambers coupled to each other in series, each having tracks for transporting the carriers directly from one chamber to the next; wherein selected chambers of the plurality of processing chambers comprise at least one combination source having a sputtering module and an evaporation module arranged linearly in the direction of travel of the carriers.