The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Jun. 04, 2014
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Hajime Nakao, Azumino, JP;
Eiji Natori, Chino, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/045 (2006.01); B41J 2/14 (2006.01); B41J 2/16 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
B41J 2/14233 (2013.01); B41J 2/14201 (2013.01); B41J 2/161 (2013.01); B41J 2/1623 (2013.01); B41J 2/1628 (2013.01); B41J 2/1631 (2013.01); B41J 2/1632 (2013.01); B41J 2/1645 (2013.01); B41J 2/1646 (2013.01); H01L 41/081 (2013.01); H01L 41/0973 (2013.01); Y10T 29/42 (2015.01);
Abstract
A piezoelectric unit includes a diaphragm made of ceramics, a base portion having a pressure chamber in which the diaphragm is set to a wall and a piezoelectric element having a dielectric layer provided at the opposite side of the base portion with respect to the diaphragm. In the piezoelectric unit, the roughness of a crystal of the outermost interface at the side of the piezoelectric element of the diaphragm is further smoothened than that of a ceramics material which is included in the diaphragm more inside than the interface.