The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2015
Filed:
Dec. 06, 2010
Yoshitaka Sasago, Tachikawa, JP;
Masaharu Kinoshita, Tsukuba, JP;
Mitsuharu Tai, Matsudo, JP;
Akio Shima, Hino, JP;
Kenzo Kurotsuchi, Kodaira, JP;
Takashi Kobayashi, Higashimurayama, JP;
Yoshitaka Sasago, Tachikawa, JP;
Masaharu Kinoshita, Tsukuba, JP;
Mitsuharu Tai, Matsudo, JP;
Akio Shima, Hino, JP;
Kenzo Kurotsuchi, Kodaira, JP;
Takashi Kobayashi, Higashimurayama, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
When a thin channel semiconductor layer formed on a side wall of a stacked film in which insulating films and gate electrodes are alternately stacked together is removed on the stacked film, a contact resistance between a vertical transistor including the channel semiconductor layer and the gate electrode, and a bit line formed on the stacked film is prevented from rising. As its means, a conductive layer electrically connected to the channel semiconductor layer is disposed immediately above the stacked film.