The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2015
Filed:
Sep. 19, 2013
Daihen Corporation, Osaka-shi, Osaka, JP;
Takumi Kobayashi, Osaka, JP;
DAIHEN CORPORATION, Osaka, JP;
Abstract
A calculating apparatus includes an acquiring portion and a calculating portion. The acquiring portion acquires a center position of a wafer placed on an alignment apparatus, and a wafer angle corresponding to a marker such as an orientation flat. The calculating portion calculates by using the wafer center position and the wafer angle, a rotational angle of the wafer on the alignment apparatus, an approach angle, which is an angle of a direction in which a transfer robot approaches the wafer, and a distance between the wafer after the rotation and the transfer robot. Then, the alignment apparatus rotates the wafer by the rotational angle. The transfer robot turns by the approach angle. Subsequently, the transfer robot extends its arm according to the distance, thereby approaching the wafer, and retrieves the wafer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile