The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2015
Filed:
Jul. 03, 2012
Applicants:
Jun Emoto, Tokyo, JP;
Tadamasa Iwamoto, Tokyo, JP;
Toshihiko Miyajima, Tokyo, JP;
Inventors:
Assignee:
TDK Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B65B 31/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67772 (2013.01);
Abstract
To prevent an inert gas from stagnating in an internal space of a mount base of a load port apparatus, the load port apparatus includes: an outside air supply device for introducing an air from an external space, in which an operator works, into the internal space of the mount base; a casing surrounding a space in which a drive mechanism for a door is arranged; and a duct through which a gas inside the internal space of the casing is dischargeable.