The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2015

Filed:

Mar. 30, 2012
Applicants:

Marco Rolandi, Seattle, WA (US);

Hideki Sato, Hino, JP;

Stephanie Vasko, Seattle, WA (US);

Michael Brasino, Issaquah, WA (US);

Adnan Kapetanovic, Tukwila, WA (US);

Vamsi Talla, Seattle, WA (US);

Inventors:

Marco Rolandi, Seattle, WA (US);

Hideki Sato, Hino, JP;

Stephanie Vasko, Seattle, WA (US);

Michael Brasino, Issaquah, WA (US);

Adnan Kapetanovic, Tukwila, WA (US);

Vamsi Talla, Seattle, WA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/36 (2006.01); H01L 21/02 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); G03F 7/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02636 (2013.01); B81C 1/00492 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G03F 7/0002 (2013.01); H01L 21/02532 (2013.01); B81C 2201/0154 (2013.01); H01L 21/02656 (2013.01);
Abstract

Methods for forming inorganic nanostructures are provided. The methods create the inorganic nanostructures by positioning a writing electrode (e.g., a conductive 'stamp') spaced nanometers above a substrate such that a precursor is intermediate the two. Applying an electric field, a voltage bias, an ionic current, or an electronic current between the writing electrode and the substrate converts the precursor into an inorganic solid material (e.g., a semiconductor such as silicon or germanium) in the area of the writing electrode.


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