The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2015
Filed:
May. 22, 2009
Richard A. Lawson, Atlanta, GA (US);
Clifford L. Henderson, Douglasville, GA (US);
Richard A. Lawson, Atlanta, GA (US);
Clifford L. Henderson, Douglasville, GA (US);
Georgia Tech Research Corporation, Atlanta, GA (US);
Abstract
The various embodiments of the present disclosure relate generally to resists and, more particularly, to negative tone molecular glass resists, and their associated methods of fabrication and use. In one embodiment of the present invention, a negative tone molecular glass-based resist comprises: a molecular glass, comprising, a molecular glass core, wherein the molecular glass core is not a polymer chain, and a functional group bound to the molecular glass core and configured to provide a decrease in solubility of the molecular glass; and an initiating component configured to produce a reactive species upon exposure to radiation, wherein the reactive species facilitates the decrease in solubility of the molecular glass.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile