The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2015
Filed:
Feb. 27, 2014
Dainippon Screen Mfg. Co., Ltd., Kyoto-Shi, Kyoto, JP;
Osaka University, Suita-shi, Osaka, JP;
Akira Ito, Kyoto, JP;
Hidetoshi Nakanishi, Kyoto, JP;
Masayoshi Tonouchi, Suita, JP;
Iwao Kawayama, Suita, JP;
SCREEN HOLDINGS CO., LTD., Kyoto, JP;
Abstract
An inspecting device inspects an inspecting target that is a semiconductor device or a photo device. The inspecting device includes: a stage for holding an inspecting target; a femtosecond laser for emitting pulsed light; a galvano mirror for obliquely irradiating the inspecting target with the pulsed light, while changing an optical path of the pulsed light, to scan the inspecting target with the pulsed light; and a detection part for detecting an electromagnetic wave emitted non-coaxially with the pulsed light from the inspecting target in accordance with the illumination with the pulsed light.