The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2015

Filed:

Apr. 08, 2013
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Jun Amako, Matsumoto, JP;

Kohei Yamada, Minowa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 5/36 (2006.01); G01J 1/04 (2006.01); G01N 21/552 (2014.01); G01N 21/65 (2006.01); G01N 21/77 (2006.01); G01N 21/55 (2014.01);
U.S. Cl.
CPC ...
G01J 1/0407 (2013.01); G01N 21/55 (2013.01); G01N 21/553 (2013.01); G01N 21/658 (2013.01); G01N 21/774 (2013.01);
Abstract

A sensor chip includes: a substrate that has a planar portion; and a diffraction grating on the planar portion and having a metal surface, the diffraction grating having a target substance thereon and including: a plurality of first protrusions periodically arranged in a period equal to or greater than 100 nm and equal to or less than 1000 nm in a first direction parallel to the planar portion, a plurality of base portions located between two adjacent first protrusions and configures abase of the substrate, a plurality of second protrusions formed on upper faces of the plurality of first protrusions, and a plurality of third protrusions formed on the plurality of base portions.


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