The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2015

Filed:

Feb. 19, 2013
Applicant:

Dr. Johannes Heidenhain Gmbh, Traunreut, DE;

Inventors:

Wolfgang Holzapfel, Obing, DE;

Joerg Drescher, Samerberg, DE;

Markus Meissner, Uebersee, DE;

Ralph Joerger, Traunstein, DE;

Bernhard Musch, Otterfing, DE;

Thomas Kaelberer, Schrobenhausen, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01); G01B 11/14 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
G01B 11/002 (2013.01); G01B 11/14 (2013.01); H01L 21/6715 (2013.01); H01L 21/67138 (2013.01); H01L 21/67144 (2013.01); H01L 21/68 (2013.01); H01L 21/681 (2013.01); Y10T 29/49778 (2015.01); Y10T 29/54 (2015.01);
Abstract

In a system and a method for positioning a processing tool in relation to a workpiece, an object alignment mark and the workpiece are situated on a first object. In addition, a workpiece alignment mark is situated on the workpiece. The processing tool via which the object alignment mark is detectable is situated on a second object, which is disposed so as to be displaceable along at least one movement direction in relation to the first object. Furthermore, an alignment sensor is disposed thereon, with whose aid the object alignment mark and the workpiece alignment mark are detectable. In addition, a scannable measuring standard, which extends along the at least one movement direction, is disposed on the second object. At least two scanning units for scanning the measuring standard are situated on the first object in order to thereby determine the relative position between the first and the second object along the movement direction, the two scanning units having a defined offset.


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