The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2015

Filed:

Jul. 17, 2014
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

William Robert Morrison, Dallas, TX (US);

Mark Christopher Fisher, Farmersville, TX (US);

Murali Hanabe, Plano, TX (US);

Ganapathy Subramaniam Sivakumar, Allen, TX (US);

Simon Joshua Jacobs, Lucas, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/469 (2006.01); B81C 1/00 (2006.01); B81B 7/00 (2006.01); H04W 4/02 (2009.01); H01L 21/02 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/0096 (2013.01); B81B 3/0005 (2013.01); B81B 7/0032 (2013.01); B81C 1/00261 (2013.01); H01L 21/02112 (2013.01); H04W 4/02 (2013.01); Y02B 60/50 (2013.01); Y10S 257/914 (2013.01);
Abstract

A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.


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