The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2015
Filed:
Aug. 05, 2013
Applicants:
Chuan-wei Wang, Hsin-Chu, TW;
Chih-ming Sun, Hsin-Chu, TW;
Inventors:
Chuan-Wei Wang, Hsin-Chu, TW;
Chih-Ming Sun, Hsin-Chu, TW;
Assignee:
PIXART IMAGING INCORPORATION, R.O.C., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 1/04 (2006.01); B81B 7/00 (2006.01); H04R 19/04 (2006.01); H04R 19/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0051 (2013.01); H04R 19/04 (2013.01); H04R 19/005 (2013.01);
Abstract
The present invention discloses a MEMS microphone device and its manufacturing method. The MEMS microphone device includes: a substrate including a first cavity; a MEMS device region above the substrate, wherein the MEMS device region includes a metal layer, a via layer, an insulating material region and a second cavity; a mask layer above the MEMS device region; a first lid having at least one opening communicating with the second cavity, the first lid being fixed above the mask layer; and a second lid fixed under the substrate.