The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2015
Filed:
Jan. 23, 2014
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Hitoshi Sakuma, Tokyo, JP;
Kazuhiko Maejima, Tokyo, JP;
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11B 21/24 (2006.01); H01L 41/047 (2006.01); B41J 2/14 (2006.01); G11B 5/48 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0475 (2013.01); B41J 2/14201 (2013.01); G11B 5/4873 (2013.01); G11B 21/24 (2013.01);
Abstract
An object is to increase the amount of displacement of a thin-film piezoelectric element including a piezoelectric thin film having an uneven-shaped contact surface with the planar shape and the layer structure of the thin-film piezoelectric element kept unchanged. The thin-film piezoelectric element includes a pair of electrode layers and a piezoelectric thin film sandwiched between the pair of electrode layers, in which a surface roughness P-V of an interface between the piezoelectric thin film and at least one of the pair of electrode layers is 220 nm or more and 500 nm or less.