The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2015
Filed:
Jun. 12, 2014
Applicants:
Sayantan Das, Tempe, AZ (US);
Terry Alford, Tempe, AZ (US);
Inventors:
Sayantan Das, Tempe, AZ (US);
Terry Alford, Tempe, AZ (US);
Assignee:
Arizona Board of Regents on Behalf of Arizona State University, Scottsdale, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/52 (2006.01); H01L 23/48 (2006.01); H01L 21/44 (2006.01); H01L 21/768 (2006.01); H01L 23/482 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76886 (2013.01); H01L 23/4827 (2013.01); H01L 23/53233 (2013.01); H01L 23/53271 (2013.01);
Abstract
A method for preparing a device having a film on a substrate is disclosed. In the method, a film is deposited on a substrate. The film includes a first and a second metal. The first and the second metals in the film are converted to an intermetallic compound using microwave radiation. One example device prepared by the method includes a silicon substrate and a film on the substrate, wherein the film includes semiconducting copper germanide as the intermetallic compound.