The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2015
Filed:
Aug. 07, 2013
Applied Materials, Inc., Santa Clara, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Steve Szudarski, Fremont, CA (US);
Andrew Scott Cornelius, San Jose, CA (US);
Amitabh Puri, San Jose, CA (US);
Michael Robert Rice, Pleasanton, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Steven V. Sansoni, Livermore, CA (US);
Robert Irwin Decottignies, Redwood City, CA (US);
Dean C. Hruzek, Cedar Park, TX (US);
Peter Irwin, Austin, TX (US);
Nir Merry, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers; (3) a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools; and (4) a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system. Numerous other aspects are provided.