The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2015
Filed:
Apr. 22, 2009
Shinji Uchida, Matsumoto, JP;
Shinji Uchida, Matsumoto, JP;
FUJI ELECTRIC CO., LTD., , JP;
Abstract
An imprinting method forms a pattern in a resist surface of a substrate coated with a thermoplastic resist by using a mold having a pattern of projections and recesses formed in a transfer surface. The method includes an alignment step, a heating step, a press step, a cooling step, and release step, wherein the steps are performed in a plurality of units selected from independent units, composite units, and combinations of independent units and composite units. A mold and a substrate are paired with each other and conveyed between the units. An imprinting apparatus includes a plurality of units which perform the steps in the imprinting method and which are selected from independent units, composite units, and combinations of independent units and composite units. Conveying devices are provided which convey the mold and the substrate paired with each other between the plurality of units.