The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2015

Filed:

Sep. 10, 2013
Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Asumi Jindo, Okazaki, JP;

Katsuhiro Inoue, Ama-Gun, JP;

Yuji Katsuda, Tsushima, JP;

Assignee:

NGK Insulators, Ltd., Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B32B 18/00 (2006.01); H01J 37/32 (2006.01); C04B 35/58 (2006.01); C04B 35/581 (2006.01); C04B 35/645 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); B32B 18/00 (2013.01); C04B 35/58 (2013.01); C04B 35/581 (2013.01); C04B 35/645 (2013.01); H01J 37/3222 (2013.01); H01J 37/3255 (2013.01); H01J 37/32238 (2013.01); H01J 37/32477 (2013.01); H01J 37/32715 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3222 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3865 (2013.01); C04B 2235/3869 (2013.01); C04B 2235/72 (2013.01); C04B 2235/80 (2013.01); C04B 2235/9607 (2013.01); C04B 2237/366 (2013.01); C04B 2237/60 (2013.01); Y10T 428/265 (2015.01);
Abstract

A laminated structureincludes a first structurecontaining a main phase of magnesium-aluminum oxynitride, a second structurecontaining a main phase of aluminum nitride and grain boundary phases of a rare-earth aluminum composite oxide having a garnet-type crystal structure, and a reaction layerformed between the first structureand the second structure. The reaction layeris an aluminum nitride layer containing a smaller amount of grain boundary phasesof the rare-earth aluminum composite oxide than the second structure. The reaction layerof the laminated structurehas a thickness of 150 μm or less. The reaction layeris formed during the sintering by diffusing the grain boundary phasesinto the first structure


Find Patent Forward Citations

Loading…