The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2015

Filed:

Aug. 16, 2011
Applicants:

Calvin J. Curtis, Lakewood, CO (US);

Alexander Miedaner, Boulder, CO (US);

Marinus Franciscus Antonius Maria Van Hest, Lakewood, CO (US);

David S. Ginley, Denver, CO (US);

Peter A. Hersh, Denver, CO (US);

Louay Eldada, Austin, TX (US);

Billy J. Stanbery, Austin, TX (US);

Inventors:

Calvin J. Curtis, Lakewood, CO (US);

Alexander Miedaner, Boulder, CO (US);

Marinus Franciscus Antonius Maria van Hest, Lakewood, CO (US);

David S. Ginley, Denver, CO (US);

Peter A. Hersh, Denver, CO (US);

Louay Eldada, Austin, TX (US);

Billy J. Stanbery, Austin, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 18/12 (2006.01); H01L 31/032 (2006.01); H01L 31/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02568 (2013.01); C23C 18/1204 (2013.01); H01L 21/02628 (2013.01); H01L 31/0322 (2013.01); H01L 31/20 (2013.01); Y02E 10/541 (2013.01);
Abstract

Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.


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