The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Nov. 20, 2013
Boe Technology Group Co., Ltd., Beijing, CN;
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Abstract
A double-surface manufacturing method and an exposure apparatus in the manufacturing process of semiconductors and liquid crystal displays (LCD) are provided. In the exposure process, two masks in the exposure apparatus are subjected to alignment treatment; the substrate is conveyed to a position between the two masks in the exposure apparatus; and patterns of the two surfaces of the substrate are processed. The exposure apparatus comprises two masks, wherein a substrate to be processed is disposed between the two masks; and mask alignment marks are respectively disposed on the two masks. The embodiments of the present invention improve the accuracy of the patterns of the two surfaces of the substrate and the product quality in the double surfaces manufacturing of the substrate.