The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2015

Filed:

Feb. 25, 2011
Applicants:

Ian David Stones, Burgess Hill, GB;

Ian Olsen, Crawley, GB;

Richard Glyn Horler, Crawley, GB;

Inventors:

Ian David Stones, Burgess Hill, GB;

Ian Olsen, Crawley, GB;

Richard Glyn Horler, Crawley, GB;

Assignee:

EDWARDS LIMITED, Crawley, West Sussex, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 37/14 (2006.01); F04B 23/04 (2006.01); F04B 37/02 (2006.01); F04B 37/06 (2006.01); F04B 41/06 (2006.01); F04C 25/02 (2006.01); F04C 28/02 (2006.01); F04C 28/06 (2006.01); F04D 19/04 (2006.01);
U.S. Cl.
CPC ...
F04B 37/14 (2013.01); F04B 23/04 (2013.01); F04B 37/02 (2013.01); F04B 37/06 (2013.01); F04B 41/06 (2013.01); F04C 25/02 (2013.01); F04C 28/02 (2013.01); F04C 28/065 (2013.01); F04D 19/046 (2013.01); F04B 2201/1201 (2013.01); F04C 2240/70 (2013.01);
Abstract

The present invention relates to a vacuum pumping system () for evacuating gas from a plurality of chambers () at different pressures. The pumping system comprises a plurality of compound vacuum pumps (), wherein each compound pump comprises a plurality of pumping mechanisms () connected in series between a pump inlet () and a pump exhaust () and an interstage port () between pumping mechanisms in the series. The system is configured such that gas evacuated from one of said chambers is pumped through the interstage ports of at least two of said compound pumps.


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