The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2015

Filed:

Feb. 24, 2014
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventor:

Jean-Paul Perin, Seyssins, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/22 (2006.01); H05G 2/00 (2006.01); C23C 14/04 (2006.01); C23C 14/14 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); H01J 35/08 (2006.01);
U.S. Cl.
CPC ...
C23C 14/228 (2013.01); C23C 14/042 (2013.01); C23C 14/14 (2013.01); C23C 14/505 (2013.01); C23C 14/541 (2013.01); H05G 2/001 (2013.01); H01J 35/08 (2013.01); H01J 2235/085 (2013.01);
Abstract

A method of manufacturing a target for the generation of radiation of photons, protons or electrons by means of a laser, including: forming a support including first and second surfaces connected by openings, and forming in an enclosure a layer of material on the first surface by protecting the first surface with a protection element, injecting into the enclosure a gas of filling material, adjusting the pressure in the enclosure and the temperature of the support to form plugs of material in the openings of the support, and maintaining the temperature of the support and the pressure in the enclosure at values to maintain the plugs, followed by withdrawing the protection element from the first surface, and forming a layer of metallic material on the first surface of the support and on the plugs. The pressure and support temperature are then modified to remove the plugs.


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