The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Jan. 16, 2014
Applicants:
Jochen Zoellin, Muellheim, DE;
Christoph Schelling, Stuttgart, DE;
Inventors:
Jochen Zoellin, Muellheim, DE;
Christoph Schelling, Stuttgart, DE;
Assignee:
ROBERT BOSCH GMBH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81B 7/02 (2006.01); H04R 1/00 (2006.01); H04R 19/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81B 3/00 (2013.01); B81B 3/0035 (2013.01); B81B 7/02 (2013.01); H04R 1/00 (2013.01); H04R 19/00 (2013.01); H04R 19/005 (2013.01); H04R 2201/003 (2013.01);
Abstract
An MEMS component includes at least one metal-ceramic multilayer stack as a mechanical functional layer in the layered structure of the MEMS component. The metal-ceramic multilayer stack functions as a mechanical functional layer in which at least one component of the micromechanical structure of the MEMS component is configured.