The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Apr. 05, 2012
Motoki Takabe, Matsumoto, JP;
Takumi Yamaoka, Chino, JP;
Takahiro Kamijo, Matsumoto, JP;
Seiko Epson Corporation, , JP;
Abstract
A method for manufacturing a liquid ejecting head which includes forming a first electrode on a vibration plate, forming a piezoelectric body on the first electrode, and forming a first layer having a greater thermal expansion rate than the piezoelectric body and the same conductivity as the second electrode, on the piezoelectric body. The method also includes forming a sacrifice layer on the first layer, heating the vibration plate, the first electrode, the piezoelectric body, the first layer, and the sacrifice layer to oxidize the sacrifice layer, and then cooling the vibration plate, the first electrode, the piezoelectric body, the first layer, and the sacrifice layer after the heating. Lastly, a second layer having the same conductivity as the second electrode is formed on the first layer and the sacrifice layer, after the cooling.