The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2015
Filed:
Aug. 19, 2013
Harris Corporation, Melbourne, FL (US);
John E. Rogers, Gainesville, FL (US);
Harris Corporation, Melbourne, FL (US);
Abstract
Integrated Microelectromechanical System ('MEMS') devices and methods for making the same. The MEMS devices comprise a substrate () and a MEMS filter device () mechanically suspended above a major surface of the substrate. A first gas gap () exists between the major surface of the substrate and the MEMS filter device. An isolation platform () is provided to absorb vibrations from an external environment prior to reaching the MEMS filter device. In this regard, the isolation platform comprises: a frame structure () framing a periphery of the MEMS filter device; and at least one resilient component (-) coupled between the frame structure and the MEMS filter device. The frame structure is mechanically connected to the substrate. Electronic circuitry is connected to the MEMS filter device via a resilient interconnection () that is movable in at least one direction of the vibrations.