The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2015

Filed:

Aug. 19, 2014
Applicant:

China Electronic Technology Corporation, 24th Research Institute, Chongqing, CN;

Inventors:

Kai-Zhou Tan, Chongqing, CN;

Zhao-Huan Tang, Chongqing, CN;

Rong-Kan Liu, Chongqing, CN;

Yong Liu, Chongqing, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/15 (2006.01); H01L 27/07 (2006.01); H01L 29/02 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0638 (2013.01); H01L 29/063 (2013.01);
Abstract

A device structure is provided to reduce the leakage current of semiconductor devices with a floating buried layer (FBL), includes a substrate, a first epitaxial layer, a split floating buried layer, a second epitaxial layer, a doped trench, a protected device, a surface junction termination extension (S-JTE) and a scribe street. The device and the S-JTE are designed at the second epitaxial layer and the split floating buried layer at the joint of the first and second epitaxial layers. The doped trench is penetrated through the second epitaxial layer and connected to the split floating buried layer. The substrate, the first and second epitaxial layers feature the same typed doping which is opposite to that of split floating buried layer and doped trench.


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