The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2015

Filed:

Feb. 17, 2012
Applicants:

Jian LI, Golden, CO (US);

Dean Levi, Indian Hills, CO (US);

Miguel Contreras, Golden, CO (US);

Stephen Glynn, Boulder, CO (US);

Inventors:

Jian Li, Golden, CO (US);

Dean Levi, Indian Hills, CO (US);

Miguel Contreras, Golden, CO (US);

Stephen Glynn, Boulder, CO (US);

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01N 21/21 (2006.01); G01N 21/84 (2006.01); H01L 31/0392 (2006.01); G01N 9/00 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 22/10 (2013.01); G01N 9/00 (2013.01); G01N 21/211 (2013.01); G01N 21/8422 (2013.01); H01L 22/12 (2013.01); H01L 31/03923 (2013.01); H01L 31/18 (2013.01); G01N 2021/213 (2013.01); Y02E 10/541 (2013.01);
Abstract

A method of fabricating a photovoltaic device, includes the steps of providing a glass substrate, depositing a molybdenum layeron a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident lightand determining a density of the near-substrate region of the molybdenum layer from the detected optical property. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber


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