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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9136031 B1

PDFFull Text
Date of Patent:
Sep. 15, 2015

Filed:

Apr. 23, 2013

Alumina sintered body, member including the same, and semiconductor manufacturing apparatus

Applicant:

Ngk Spark Plug Co., Ltd., Nagoya, JP;

Inventors:

Yoichi Ito, Ichinomiya, JP;

Masaki Tsuji, Gifu, JP;

Akifumi Tosa, Komaki, JP;

Takenori Sawamura, Nagoya, JP;

Assignee:

NGK SPARK PLUG CO., LTD., Nagoya, JP;

Attorney:

Leason Ellis LLP

Primary Examiner:

Mark Kopec

Assistant Examiner:

Matthew R Diaz

Int. Cl.
CPC ...
H01B 1/08 (2006.01); C04B 35/111 (2006.01); C04B 35/645 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01B 1/08 (2013.01); C04B 35/111 (2013.01); C04B 35/6455 (2013.01); H01L 21/67069 (2013.01); H01L 21/6833 (2013.01); C04B 2235/85 (2013.01); Y10T 279/23 (2015.01);
Abstract

An alumina sintered body contains alumina as a main component and titanium. The alumina sintered body further contains at least one element selected from the group consisting of lanthanum, neodymium, and cerium. Aluminum is contained in the alumina sintered body in an amount such that a ratio of aluminum oxide to total oxides in the alumina sintered body becomes 93.00 to 99.85% by weight where the total oxides are defined as a total amount of all oxides contained in the alumina sintered body. Titanium is contained in an amount such that a ratio of titanium oxide to the total oxides becomes 0.10 to 2.00% by weight. Lanthanum, neodymium, and cerium are contained in a combined amount such that a ratio of the combined amount to the total oxides becomes 0.05 to 5.00% by weight. Volume resistivity is 1×10to 1×10Ω·cm at room temperature.

Find Patent Forward Citations

Ito, Yoichi. (2015). Alumina sintered body, member including the same, and semiconductor manufacturing apparatus (U.S. Patent No. 9136031). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9136031

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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