The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2015

Filed:

May. 29, 2014
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Jumpei Naito, Kawasaki, JP;

Kota Iwasaki, Atsugi, JP;

Masafumi Kyogaku, Yokohama, JP;

Yoichi Otsuka, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); G01N 21/65 (2006.01); G01J 3/44 (2006.01);
U.S. Cl.
CPC ...
G01N 21/65 (2013.01); G01J 3/44 (2013.01);
Abstract

An optical measurement device includes a light source unit including a first laser light source configured to emit a laser beam having a first wavelength and a second laser light source configured to emit a laser beam having a second wavelength, a measurement wave number setting unit, and a light source adjustment unit configured to adjust at least one of the first wavelength and the second wavelength such that a difference between or a sum of a first wave number corresponding to the first wavelength and a second wave number corresponding to the second wavelength matches a measurement wave number set through the measurement wave number setting unit.


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