The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2015

Filed:

Oct. 03, 2012
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Tetsuji Okada, Utsunomiya, JP;

Keiji Emoto, Saitama, JP;

Noriyasu Hasegawa, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B21B 15/00 (2006.01); B23Q 1/01 (2006.01); B29C 35/08 (2006.01); B29C 69/00 (2006.01); F16F 15/00 (2006.01); F16M 5/00 (2006.01); F16M 7/00 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
B21B 15/00 (2013.01); B23Q 1/01 (2013.01); B29C 35/08 (2013.01); B29C 69/00 (2013.01); F16F 15/00 (2013.01); F16M 5/00 (2013.01); F16M 7/00 (2013.01); H01L 21/00 (2013.01); Y10T 29/51 (2015.01);
Abstract

At least three processing machines are positioned on a supporting structure including a plurality of beams spaced apart from each other. The at least three processing machines include a first processing machine, a second processing machine supported by at least one of beams which support the first processing machine, and a third processing machine supported by beams different from all the beams which support the first processing machine. A distance between the first processing machine and the second processing machine, at which an amount of vibration transferred from the first processing machine to the second processing machine becomes smaller than a predetermined amount, is determined, thereby positioning the first processing machine and the second processing machine with a distance not less than the determined distance.


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