The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2015

Filed:

Apr. 04, 2007
Applicant:

Yongli Huang, San Jose, CA (US);

Inventor:

Yongli Huang, San Jose, CA (US);

Assignee:

Kolo Technologies, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/00 (2006.01); H01L 21/00 (2006.01); B06B 1/02 (2006.01); G01N 29/24 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0292 (2013.01); B06B 1/0238 (2013.01); G01N 29/2406 (2013.01); Y10T 29/49005 (2015.01);
Abstract

An electrostatic actuator/transducer has a comb driver and can be adapted for a variety of applications, particularly as a capacitive micromachined ultrasonic transducer. The comb driver has two electrodes each connected to a set of comb fingers. The two sets of comb fingers interdigitate with each other, and in one embodiment each has a saw-toothed shape. One electrode is connected to a spring structure and movable along a vertical direction to engage and disengage the two sets of comb fingers. The movable portion is adapted to perform an actuation function and/or a sense of function. Fabrication methods for making the electrostatic actuator/transducer are also disclosed.


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