The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2015
Filed:
Jan. 19, 2011
Futoshi Hirose, Yokohama, JP;
Futoshi Hirose, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An image acquisition apparatus irradiates light from a light source to an inspection object, obtains a tomographic image of the inspection object on the basis of a combined beam obtained by combining a return beam from the inspection object due to the irradiated light and a reference beam corresponding to the light, and obtains a plane image of the inspection object on the basis of the return beam from the inspection object due to the irradiated light. The apparatus performs a first scanning process to main-scan the irradiated light when the tomographic image is obtained, performs a second scanning process to main-scan the irradiated light at a speed higher than that in the first scanning process when the plane image is obtained, and performs a third scanning process to sub-scan the irradiated light when each of the tomographic image and the plane image is obtained.