The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2015
Filed:
Oct. 04, 2013
Jochen Zoellin, Muellheim, DE;
Ricardo Ehrenpfordt, Korntal-Muenchingen, DE;
Juergen Graf, Stuttgart, DE;
Christoph Schelling, Stuttgart, DE;
Frederik Ante, Stuttgart, DE;
Michael Curcic, Stuttgart, DE;
Jochen Zoellin, Muellheim, DE;
Ricardo Ehrenpfordt, Korntal-Muenchingen, DE;
Juergen Graf, Stuttgart, DE;
Christoph Schelling, Stuttgart, DE;
Frederik Ante, Stuttgart, DE;
Michael Curcic, Stuttgart, DE;
ROBERT BOSCH GMBH, Stuttgart, DE;
Abstract
A capacitive MEMS microphone structure is provided, which micromechanical microphone structure of component is realized in a layer construction and includes: a diaphragm structure sensitive to sound pressure, which is deflectable in a direction perpendicular to the layer planes of the layer construction; an acoustically penetrable counter-element which has through holes and is formed above or below the diaphragm structure in the layer construction; and a capacitor system for detecting the excursions of the diaphragm structure. The diaphragm structure includes a structural element in the middle area of the diaphragm structure, which structural element projects perpendicularly from the diaphragm plane and which, depending on the degree of excursion of the diaphragm structure, variably extends into a correspondingly formed and positioned through hole in the counter-element.