The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2015
Filed:
May. 27, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Blake Koelmel, Mountain View, CA (US);
Joseph M. Ranish, San Jose, CA (US);
Abhilash J. Mayur, Salinas, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F27B 5/00 (2006.01); F27B 5/06 (2006.01); F27D 5/00 (2006.01); H01L 21/673 (2006.01); F27D 11/12 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67346 (2013.01); F27D 5/0037 (2013.01); F27D 11/12 (2013.01); H01L 21/67115 (2013.01); H01L 21/68735 (2013.01); F27D 2005/0081 (2013.01);
Abstract
Embodiments of the present invention provide an edge ring for supporting a substrate with increased temperature uniformity. More particularly, embodiments of the present invention provide an edge ring having one or more fins formed on an energy receiving surface of the edge ring. The fins may have at least one sloped side relative to a main body of the edge ring.