The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2015

Filed:

Dec. 15, 2014
Applicant:

Northeastern University, Boston, MA (US);

Inventors:

Ahmed Busnaina, Needham, MA (US);

Cihan Yilmaz, Boston, MA (US);

TaeHoon Kim, Revere, MA (US);

Sivasubramanian Somu, Natick, MA (US);

Assignee:

Northeastern University, Boston, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/3205 (2006.01); H01L 23/532 (2006.01); H01L 21/288 (2006.01); H01L 21/768 (2006.01); C25D 13/00 (2006.01); B82Y 10/00 (2011.01); B82Y 30/00 (2011.01);
U.S. Cl.
CPC ...
H01L 23/53276 (2013.01); C25D 13/00 (2013.01); H01L 21/2885 (2013.01); H01L 21/76879 (2013.01); H01L 23/53242 (2013.01); B82Y 10/00 (2013.01); B82Y 30/00 (2013.01); H01L 2221/1094 (2013.01); H01L 2924/0002 (2013.01);
Abstract

The invention provides a fast, scalable, room temperature process for fabricating metallic nanorods from nanoparticles or fabricating metallic or semiconducting nanorods from carbon nanotubes suspended in an aqueous solution. The assembled nanorods are suitable for use as nanoscale interconnects in CMOS-based devices and sensors. Metallic nanoparticles or carbon nanotubes are assembled into lithographically patterned vias by applying an external electric field. Since the dimensions of nanorods are controlled by the dimensions of vias, the nanorod dimensions can be scaled down to the low nanometer range. The aqueous assembly process is environmentally friendly and can be used to make nanorods using different types of metallic particles as well as semiconducting and metallic nanotubes.


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